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Ensinger PEI
Tosoh S Fused Silica Glass
Categories: Ceramic; Glass

Material Notes: Tosoh S material is manufactured by fusing a synthetic super high-purity silica powder using Tosoh’s proprietary oxy-hydrogen flame fusion process. Tosoh SD material is fused from the same synthetic super high-purity powder using a plasma fusion process for reduced OH content. Thanks to their extreme purity and complete lack of inclusions, S and SD materials are the next generation of materials for semiconductor manufacturing. Available in up to 1,200mm square ingots, S and SD materials are 450mm wafer ready.

Information provided by Tosh Corporation

Vendors:
Available Properties
  • Density
  • Viscosity
  • Hardness, Vickers
  • Tensile Strength
  • Modulus of Elasticity, Young's
  • Flexural Strength
  • Compressive Strength
  • Poissons Ratio
  • Shear Modulus
  • Torsional Stiffness
  • Volume Resistivity
  • Surface Resistance
  • Dielectric Constant
  • Dielectric Strength
  • Dielectric Loss Index
  • CTE, linear
  • Specific Heat Capacity
  • Thermal Conductivity
  • Softening Point, (?=107.6)*2
  • Annealing Point, (?=1013)
  • Strain Point, (?=1014.5)
  
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