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Master Bond adhesives

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Brewer Science ProTEK® PSB Photosensitive Protective Coating
Categories: Other Engineering Material

Material Notes: ProTEK® PSB coating is a negative-working photosensitive alkaline-resistant etch mask that allows bulk silicon micromachining late in the device fabrication process while preserving the metal stack. It is applied as a primer and then a protective coating in a spin coating process.

Benefits:

  • Apply over CMOS structures at low process temperatures
  • Shorten processing time compared to SiN etch masks
  • Provide higher throughput than single-wafer deep reactive ion etching by using batch processing

Information provided by Brewer Science.

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Physical PropertiesOriginal ValueComments
Thickness 2.30 micronsSpin Speed 4000 rpm
 6.00 micronsSpin Speed 700 rpm
 
Processing PropertiesOriginal ValueComments
Shelf Life 9.00 Month
@Temperature 16.0 - 26.0 °C
Primer
 12.0 Month
@Temperature 16.0 - 26.0 °C
Coating

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