Morgan Advanced Ceramics Alumina AL998A Aluminum Oxide Ceramic

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Morgan Advanced Ceramics Alumina AL998A Aluminum Oxide Ceramic
Categories:	Ceramic; Oxide; Aluminum Oxide
Material Notes:	High purity alumina with a minimum purity of 99.8%. Specifically developed for semiconductor processing applications. Prime Features: High resistance to semiconductor etch chemistries Excellent chemical resistance to acids, bases and organics Small grain size, low porosity, high polishability. High volume resistivity Superior mechanical wear resistance Less than 100 ppm soda and silica impurity levels Maintains surface integrity in corrosive environments Typical applications: Semiconductor components for etch, PVD, CVD, CMP, implant and litho processes High power laser insulators Wear-resistant rotary components Blood seals and valves Piston & sleeve pump sets High vacuum components Production Capabilities: Process application suppori Isostatic, monostatic & uniaxial pressing Lapping & polishing to 2 microinch Ra Manual, CNC and high precision machining Straight right cylinder straightness to <10 microinch per inch and roundness to <20 microinches Information provided by Morgan Advanced Materials
Key Words:	AL998A
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Physical Properties	Original Value	Comments

Density	3.94 g/cc	ASTM C373
Water Absorption	>= 0.0040 %	ASTM C373
Grain Size	>= 6.0 µm	ASTM E112-96
Permeability	>= 1.0e-10	Torr-L/sec; He Leak detection
Weibull Modulus	25	ASTM C1161, C1239

Mechanical Properties	Original Value	Comments
Hardness, Rockwell HR45N	86
Modulus of Elasticity	391 GPa	ASTM C848
Flexural Strength	361 MPa @Temperature 20.0 °C	3-point bend
Poissons Ratio	0.19	ASTM C848
Fracture Toughness	4.30 - 4.60 MPa-m½	NIST Indentation

Electrical Properties	Original Value	Comments
Volume Resistivity	4.00e+7 ohm-cm @Temperature 700 °C	ASTM D257
	4.00e+11 ohm-cm @Temperature 300 °C	ASTM D257
	1.00e+14 ohm-cm @Temperature 20.0 °C	ASTM D257
Dielectric Constant	9.6 @Frequency 1e+6 Hz	ASTM D2520
Dielectric Strength	>= 23.0 kV/mm	ASTM D149
Dissipation Factor	0.00030 @Frequency 1e+6 Hz	ASTM D150

Thermal Properties	Original Value	Comments
CTE, linear	7.40 µm/m-°C @Temperature 40.0 - 400 °C	ASTM C372
	8.10 µm/m-°C @Temperature 40.0 - 800 °C	ASTM C372
Specific Heat Capacity	0.911 J/g-°C @Temperature 100 °C	ASTM E1461
Thermal Conductivity	27.0 W/m-K @Temperature 100 °C	ASTM C408

Component Elements Properties	Original Value	Comments
Al2O3	>= 99.8 %

Descriptive Properties
Color	ivory
Content	<100 ppm	Impurities (as SiO2)
Inclusions	0, 3x visual, .0.8mm dia
Thermal Shock Resistance	ΔT = 212°C	ASTM C1525

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CMORF5018 / 200256

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