Eastman EastaPure™ Ethyl Acetate Solvent

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Eastman EastaPure™ Ethyl Acetate Solvent
Categories:	Fluid; Solvent
Material Notes:	CAS No. 1-78-6 Product Description: Eastman EastaPure™ Ethyl Acetate solvent is a viscosity reducer for resins used in photoresist formulations. Ethyl Acetate can also be used as a primary photoresist solvent and is compatible with many resist polymers. High-purity (low-trace metals) solvents are required to make acceptable semiconductor chips, and special handling and storage procedures are used to maintain high purity. The chemical substances for this product are listed as Inert Ingredients Permitted for Use in Nonfood Use Pesticide Products, and in Food Use Pesticide Products with limitations, under the Federal Insecticide, Fungicide, and Rodenticide Act (FIFRA). Application/Uses: Advanced resist Developers Edge bead removal Flat Panel/LCD LED/OLED Microelectronics Negative tone resist Photolithography Photoresist Photoresist stripper applications Positive tone resist Semiconductors Solvents Key Attributes: Excellent resin solubility High assay High Purity/Low Trace Metals Inert - Food use with limitations Inert - Nonfood use Viscosity reducer Information provided by Eastman
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Physical Properties	Original Value	Comments

Density	0.901 g/cc
Viscosity	0.50 cP	Liquid
Molecular Weight	88.11 g/mol
Vapor Pressure	0.113 atm @Temperature 20.0 °C
	0.4529 atm @Temperature 55.0 °C
Surface Tension	23.9 dynes/cm

Chemical Properties	Original Value	Comments
Critical Pressure	38.3 atm
Critical Temperature	250.1 °C

Thermal Properties	Original Value	Comments
CTE, linear	134 µm/m-°C
Melting Point	-84.0 °C	Freezing Point
Boiling Point	75.5 - 78.0 °C	@ 760 mm Hg
Flash Point	-4.00 °C	Tag Open Cup

Optical Properties	Original Value	Comments
Refractive Index	1.37

Descriptive Properties
Color	PT-Co
Upper Limits for Trace Metals	50 ppb	Sodium
	50 ppb	Potassium
	50 ppb	Lithium
	50 ppb	Magnesium
	50 ppb	Calcium
	50 ppb	Iron
	50 ppb	Zinc

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PEATM5144 / 222338

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