Poco Graphite Premium Silicon Carbide SUPERSiC® Silicon Carbide SUPERSiC®-H

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Poco Graphite Premium Silicon Carbide SUPERSiC® Silicon Carbide SUPERSiC®-H
Categories:	Ceramic; Carbide
Material Notes:	SUPERSiC is a silicon carbide material created and customized precisely for specific applications. SUPERSiC® Silicon Carbide Ideal for industrial, photovoltaic, semiconductor and aerospace optics application. SUPERSiC®-H is the base converted silicon carbide with extra processing to reduce non-metallic impurities. This material is ideal for high-temperature and atmospheric processes and harsh process environments. Features: Ultra high pure material with very low metallic contamination (less than 1 ppm total). Unique conversion process produces high quality silicon carbide. Superb resistance to chemical, thermal, and process erosion. Near-net shaping process allows for complex shapes with reduced post machining. Improved cost of ownership vs competitive materials. Applications: Plasma etch. RTP applications. Information provided by Entegris POCO Materials.
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Available Properties
Bulk Density Apparent Bulk Density Open Porosity Porosity, Total Hardness, Knoop, kg/mm2 Tensile Strength Modulus of Elasticity Flexural Strength Poissons Ratio Fracture Toughness Shear Modulus Electrical Resistivity CTE, linear, @ RT Thermal Conductivity

Property Data

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Manufacturer Notes:
Poco Graphite - Entegris

Category Notes
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