| SUPERSiC is a silicon carbide material created and customized precisely for specific applications. SUPERSiC® Silicon Carbide Ideal for industrial, photovoltaic, semiconductor and aerospace optics application. SUPERSiC®-H is the base converted silicon carbide with extra processing to reduce non-metallic impurities. This material is ideal for high-temperature and atmospheric processes and harsh process environments. Features: Ultra high pure material with very low metallic contamination (less than 1 ppm total). Unique conversion process produces high quality silicon carbide. Superb resistance to chemical, thermal, and process erosion. Near-net shaping process allows for complex shapes with reduced post machining. Improved cost of ownership vs competitive materials. Applications: Plasma etch. RTP applications.Information provided by Entegris POCO Materials. |
