Greene Tweed CHEMRAZ® 640 Perfluoroelastomer

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Greene Tweed CHEMRAZ® 640 Perfluoroelastomer
Categories:	Polymer; Thermoset; Fluoropolymer, TS; Thermoset Fluoroelastomer; Rubber or Thermoset Elastomer (TSE)
Material Notes:	Chemraz® 640 perfluoroelastomer is specifically developed by Greene Tweed to meet the rigorous demands of aggressive plasma systems. This product’s unique formulation provides enhanced plasma resistance in oxygen and fluorine plasma processes resulting in minimal contamination, less downtime and higher wager processing yields. Chemraz 640 is recommended for both static and dynamics, wet and dry wafer processing applications such as etch, remote plasma cleans, and deposition (CVD, HDPCVD, etc.) Chemraz 640 remains stable at service temperatures up to 554°F (290°C). Applications: Endpoint windows Valve seals Isolator valve seals Lid seals Gas inlet/outlet seals Slit valve seals Chamber seals Gasket seals Dispensing seals Regulator seals Filler seals Information provided by Greene Tweed.
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Physical Properties	Original Value	Comments

Specific Gravity	2.08 g/cc	ASTM D297

Mechanical Properties	Original Value	Comments
Hardness, Shore A	80	ASTM D2240
Tensile Strength at Break	1735 psi	ASTM D1414
Tensile Strength, Yield	350 psi	@50% Elongation; ASTM D1414
	1115 psi	@100% Elongation; ASTM D1414
Elongation at Break	165 %	ASTM D1414
Compression Set	25 % @Temperature 204 °C, Time 252000 sec	At 25% deflection; ASTM D395

Thermal Properties	Original Value	Comments
Maximum Service Temperature, Air	554 °F
Minimum Service Temperature, Air	-4.00 °F

Descriptive Properties
Color	Brown

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PGREEN28 / 42322

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