Poco Graphite Premium Silicon Carbide SUPERSiC® Silicon Carbide SUPERSiC®-SP

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Poco Graphite Premium Silicon Carbide SUPERSiC® Silicon Carbide SUPERSiC®-SP
Categories:	Ceramic; Carbide
Material Notes:	SUPERSiC is a silicon carbide material created and customized precisely for specific applications. SUPERSiC® Silicon Carbide Ideal for industrial, photovoltaic, semiconductor and aerospace optics application. SUPERSiC®-SP is treated with a densification process that adds more SiC to the porosity of the base substrate. Features: Increased densification of the part enhances erosion and process performance. Uniform response to thermal loading. Applications: Deposition. Optics processes and applications. Information provided by Entegris POCO Materials.
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Physical Properties	Original Value	Comments

Bulk Density	3.00 g/cc
Apparent Bulk Density	3.04 g/cc
Open Porosity	1.0 %
Porosity	5.0 %	Total

Mechanical Properties	Original Value	Comments
Tensile Strength	23510 psi
Modulus of Elasticity	373 GPa
Flexural Strength	31900 psi
Poissons Ratio	0.17
Shear Modulus	159 GPa

Thermal Properties	Original Value	Comments
CTE, linear	2.40 µm/m-°C
Thermal Conductivity	224 W/m-K

Descriptive Properties
Specific Stiffness (kN.m/g)	124
Thermal Diffusivity	111 mm2/s
Total Impurity Level (ppm)	<10

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CPOCO441 / 268795

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