Specifically developed for flat panel display CVD and dry plasma etch equipment where seal reliability and minimal contamination are essential, FPD Blue™ 707 fluoroelastomer provides excellent chemical compatibility and withstands a variety of aggressive chemicals. Available in an infinite range of geometries and cross sections, this material offers the diversity required for a variety of dynamic or static dry processing applications. FPD Blue 707 remains stable at service temperatures up to 220°C (428°F) and is ideally suited for large lid seals and bonded slit valve door seals. Applications: - Endpoint Windows
- Valve seals
- KF fitting seals
- Window seals
- Lid seals
- Gas inlet seals
- Slit valve seals
- Chamber seals
Information provided by Greene Tweed. |