| SUPERSiC is a silicon carbide material created and customized precisely for specific applications. SUPERSiC® Silicon Carbide Ideal for industrial, photovoltaic, semiconductor and aerospace optics application. SUPERSiC-GS is produced using a propriety chemical vapor conversion (CVC) process, Entegris’ process partially converts the outer layers of graphite to SiC. This converts the graphite incompletely, without creating a distinct SiC layer that could delaminate under stress, resulting in a composite SiC shell. Features: Graphite coated with a .030" (750 microns) infiltrated layer of SUPERSiC®. Increased thermal shock resistance compared to solid SiC. Initial plasma erosion resistance and physical abrasion resistance similar to SiC. Ability to hold a tighter tolerance with an as-converted artifact. Applications: Ion implant beamline components.Information provided by Entegris POCO Materials. |
