| Chemraz® 639 perfluoroelastomer is specifically developed by Greene Tweed to meet the rigorous demands of aggressive plasma systems. This product’s unique formulation provides enhanced plasma resistance in oxygen and fluorine plasma processes resulting in minimal contamination, less downtime and higher wafer processing yields. Chemraz 639 is developed from an advanced polymer utilizing fluoropolymer nano-composite technology particles. Recommended for both static and dynamic dry wafer processing applications such as etch, remote plasma cleans, and deposition (CVD, HDPCVD, etc.), Chemraz 639 remains stable at service temperatures up to 260°C (500°F). Applications: - Endpoint windows
- Bell jar seals
- Valve seals
- KF fitting seals
- Window seals
- Isolator valve seals
- Lid seals
- Gas inlet seals
- Slit valve seals
- Chamber seals
Information provided by Greene Tweed. |
