| The ACCUGLASS P-5S (κ =4.7) Spin-on Glass (SOG) is a phosphosilicate polymer used for metal and poly planarization, overcoat passivation, and non-etchback interlayer dielectric in the manufacture of integrated circuits. The ACCUGLASS P-5S series also provides Na+ gettering ability similar to P-doped CVD oxides. ACCUGLASS P-5S series contains 2.7 wt% phosphorous bonded to O atoms in the Si-O backbone. The specific formulation results in a stable dielectric constant, <2% within wafer uniformity, and can be densified at temperatures up to 700-900°C with no significant loss of phosphorous. Thin films of ACCUGLASS P-5S are applied using a commercial coater and cured in a vertical or horizontal furnace to thicknesses up to 1490Å (single coat) and 8000Å (multiple coats). Benefits - Industry proven performance and broad acceptance in subtractive aluminum processing
- Phosphorus stability up to 900°C
- Thickness variation within a wafer of less than 2%
- Cracking resistance up too 8000Å
- Adhesion to thermal SiO2, CVD SiO2 and aluminum
Applications:- ILD and PMD Planarization
- Overcoat Passivation
- Gapfill
- Interlevel Dielectric
ACCUGLASS P-5S is suitable for metal and poly planarization and non-etchback applications in SOG/CVD/SOG sandwich structures. The CVD TEOS creates a stress release for the SOG. ACCUGLASS P-5S can also be used for overcoat passivation.Information provided by Honeywell |
